Course Name | Intro. to Microelectromechanical Systems |
Code | Semester | Theory (hour/week) | Application/Lab (hour/week) | Local Credits | ECTS |
---|---|---|---|---|---|
MCE 403 | Fall/Spring | 3 | 0 | 3 | 5 |
Prerequisites | None | |||||
Course Language | English | |||||
Course Type | Elective | |||||
Course Level | First Cycle | |||||
Mode of Delivery | - | |||||
Teaching Methods and Techniques of the Course | ||||||
Course Coordinator | ||||||
Course Lecturer(s) | - | |||||
Assistant(s) | - |
Course Objectives | The purpose of the course is to introduce the fundamental principles, design, fabrication techniques and applications of MicroElectroMechanical Systems (MEMS). |
Learning Outcomes | The students who succeeded in this course;
|
Course Description | The main topics included in this course are the fundamental principles, design, fabrication techniques and applications of microelectromechanical systems (MEMS). |
Related Sustainable Development Goals | |
| Core Courses | |
Major Area Courses | X | |
Supportive Courses | ||
Media and Managment Skills Courses | ||
Transferable Skill Courses |
Week | Subjects | Required Materials |
1 | Introduction and Motivation | Liu, Foundations of MEMS (Chp 1-2) |
2 | Electrostatic Sensing and Actuation Principles | Liu, Foundations of MEMS (Chp 3-4) |
3 | Electrostatic Sensing and Actuation Principles | Liu, Foundations of MEMS (Chp 3-4) |
4 | Thermal Sensing and Actuation Principles | Liu, Foundations of MEMS (Chp 5) |
5 | Thermal Sensing and Actuation Principles | Liu, Foundations of MEMS (Chp 5) |
6 | Piezoresistive Sensing Principles | Liu, Foundations of MEMS (Chp 6) |
7 | Midterm | |
8 | Piezoelectric Sensing and Actuation Principles | Liu, Foundations of MEMS (Chp 7) |
9 | Piezoelectric Sensing and Actuation Principles | Liu, Foundations of MEMS (Chp 7) |
10 | Magnetic Sensing and Actuation Principles | Liu, Foundations of MEMS (Chp 8) |
11 | Magnetic Sensing and Actuation Principles | Liu, Foundations of MEMS (Chp 8) |
12 | Bulk and Surface Micromachining Techniques | Liu, Foundations of MEMS (Chp 11) |
13 | Microfabrication of semiconductor and in-organic materials | Liu, Foundations of MEMS (Chp 12) |
14 | MEMS Applications | Lecture Notes |
15 | Review for Final Exam | |
16 | Final Exam |
Course Notes/Textbooks | C. Liu, Foundations of MEMS, Prentice-Hill, ISBN: 0-13-147286-0, New Jersey, 2006. |
Suggested Readings/Materials |
Semester Activities | Number | Weigthing |
Participation | ||
Laboratory / Application | ||
Field Work | ||
Quizzes / Studio Critiques | ||
Portfolio | ||
Homework / Assignments | ||
Presentation / Jury | ||
Project | ||
Seminar / Workshop | ||
Oral Exam | ||
Midterm | 2 | 60 |
Final Exam | 1 | 40 |
Total |
Weighting of Semester Activities on the Final Grade | 2 | 60 |
Weighting of End-of-Semester Activities on the Final Grade | 1 | 40 |
Total |
Semester Activities | Number | Duration (Hours) | Workload |
---|---|---|---|
Course Hours (Including exam week: 16 x total hours) | 16 | 3 | 48 |
Laboratory / Application Hours (Including exam week: 16 x total hours) | 16 | ||
Study Hours Out of Class | 16 | 3 | 48 |
Field Work | |||
Quizzes / Studio Critiques | |||
Portfolio | |||
Homework / Assignments | |||
Presentation / Jury | |||
Project | |||
Seminar / Workshop | |||
Oral Exam | |||
Midterms | 2 | 17 | |
Final Exams | 1 | 20 | |
Total | 150 |
# | Program Competencies/Outcomes | * Contribution Level | ||||
1 | 2 | 3 | 4 | 5 | ||
1 | To have knowledge in Mathematics, science, physics knowledge based on mathematics; mathematics with multiple variables, differential equations, statistics, optimization and linear algebra; to be able to use theoretical and applied knowledge in complex engineering problems | X | ||||
2 | To be able to identify, define, formulate, and solve complex mechatronics engineering problems; to be able to select and apply appropriate analysis and modeling methods for this purpose. | X | ||||
3 | To be able to design a complex electromechanical system, process, device or product with sensor, actuator, control, hardware, and software to meet specific requirements under realistic constraints and conditions; to be able to apply modern design methods for this purpose. | X | ||||
4 | To be able to develop, select and use modern techniques and tools necessary for the analysis and solution of complex problems encountered in Mechatronics Engineering applications; to be able to use information technologies effectively. | X | ||||
5 | To be able to design, conduct experiments, collect data, analyze and interpret results for investigating Mechatronics Engineering problems. | X | ||||
6 | To be able to work effectively in Mechatronics Engineering disciplinary and multidisciplinary teams; to be able to work individually. | X | ||||
7 | To be able to communicate effectively in Turkish, both in oral and written forms; to be able to author and comprehend written reports, to be able to prepare design and implementation reports, to present effectively, to be able to give and receive clear and comprehensible instructions. | |||||
8 | To have knowledge about global and social impact of engineering practices on health, environment, and safety; to have knowledge about contemporary issues as they pertain to engineering; to be aware of the legal ramifications of engineering solutions. | X | ||||
9 | To be aware of ethical behavior, professional and ethical responsibility; information on standards used in engineering applications. | |||||
10 | To have knowledge about industrial practices such as project management, risk management and change management; to have awareness of entrepreneurship and innovation; to have knowledge about sustainable development. | |||||
11 | Using a foreign language, he collects information about Mechatronics Engineering and communicates with his colleagues. ("European Language Portfolio Global Scale", Level B1) | |||||
12 | To be able to use the second foreign language at intermediate level. | X | ||||
13 | To recognize the need for lifelong learning; to be able to access information; to be able to follow developments in science and technology; to be able to relate the knowledge accumulated throughout the human history to Mechatronics Engineering. |
*1 Lowest, 2 Low, 3 Average, 4 High, 5 Highest